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Transport wafer carriers, Spectra™FOUP

Fournisseur: ENTEGRIS
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Transport wafer carriers, Spectra™FOUP
Matériel de manipulation de wafers Portoirs pour semi-conducteurs
The Spectra™ FOUP provides clean, secure wafer transport and optimum automation integration.

  • Effective grounding of the wafers through the door latch, conveyor plate and top handle
  • ESD shell option for added wafer protection
  • Purge-diffusing snorkels for optimum purge gas dispersion
  • Optimised for wafer contact and microenvironment control
  • Accurate equipment interfaces
  • Capacity: 25 wafers
  • Wafer spacing: 10 mm

Wafer supports are integral with shell to give excellent wafer plane performance and reliable wafer access. Ultrapure polycarbonate or barrierMore Product Information
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